Showerhead having a detachable high resistivity gas distribution plate

ABSTRACT

Embodiments of showerheads having a detachable gas distribution plate are provided herein. In some embodiments, a showerhead for use in a semiconductor processing chamber may include a body having a first side and a second side opposing the first side; a gas distribution plate disposed proximate the second side of the body, wherein the gas distribution plate is formed from a material having an electrical resistivity between about 60 ohm-cm to 90 ohm-cm; a clamp disposed about a peripheral edge of the gas distribution plate to removably couple the gas distribution plate to the body; and a thermal gasket disposed in a gap between the body and gas distribution plate.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. patent application Ser. No.14/729,736 filed Jun. 3, 2015, which claims benefit of U.S. provisionalpatent application Ser. No. 62/020,837, filed Jul. 3, 2014. Each of theaforementioned related patent applications is incorporated by referencein its entirety

FIELD

Embodiments of the present disclosure generally relate to semiconductorprocessing equipment.

BACKGROUND

Conventional showerheads utilized in semiconductor process chambers(e.g., deposition chambers, etch chambers, or the like) typicallyinclude a gas distribution plate permanently bonded to a body. The gasdistribution plate is periodically replaced due to degradation caused byexposure to plasma during plasma processes. However, the inventors haveobserved that since the gas distribution plate is permanently bonded tothe body, the entire showerhead assembly is replaced in order to replacethe gas distribution plate, thus making the replacement process costly.In addition, arcing has been observed in applications in which a highsource power process is performed using gas distribution plates with lowelectrical resistivity (e.g., 0.005-0.015 ohm-cm).

Therefore, the inventors have provided embodiments of an improvedshowerhead with detachable gas distribution plate.

SUMMARY

Embodiments of showerheads having a detachable gas distribution plateare provided herein. In some embodiments, a showerhead for use in asemiconductor processing chamber may include a body having a first sideand a second side opposing the first side; a gas distribution platedisposed proximate the second side of the body, wherein the gasdistribution plate is formed from a material having an electricalresistivity between about 60 ohm-cm to 90 ohm-cm; a clamp disposed abouta peripheral edge of the gas distribution plate to removably couple thegas distribution plate to the body; and a thermal gasket disposed in agap between the body and gas distribution plate.

In some embodiments, a process chamber may include a chamber body havinga substrate support disposed within an inner volume of the chamber body;and a showerhead disposed within the inner volume of the chamber bodyopposite the substrate support. The showerhead includes: a body having afirst side and a second side opposing the first side, wherein the firstside of the body is coupled to a component of the process chamber; a gasdistribution plate disposed proximate the second side of the body,wherein the gas distribution plate is formed from a material having anelectrical resistivity between about 60 ohm-cm to 90 ohm-cm; a clampdisposed about a peripheral edge of the gas distribution plate toremovably couple the gas distribution plate to the body; and a thermalgasket disposed in a gap between the body and gas distribution plate.

In some embodiments, a showerhead for use in a semiconductor processingchamber may include a body having a first side and a second sideopposing the first side, the second side including an yttrium fluoridecoating; a gas distribution plate disposed proximate the second side ofthe body, wherein the gas distribution plate is formed from a materialhaving an electrical resistivity between about 60 ohm-cm to 90 ohm-cm;an anodized clamp disposed about a peripheral edge of the gasdistribution plate to removably couple the gas distribution plate to thebody; a plurality of silicone thermal gaskets disposed in a gap betweenthe body and gas distribution plate; and a plurality of pins pressedinto the second side of the body and disposed in the gap to maintain athickness of the gap when the gas distribution plate deflects toward thebody.

Other and further embodiments of the present disclosure are describedbelow.

BRIEF DESCRIPTION OF THE DRAWINGS

Embodiments of the present disclosure, briefly summarized above anddiscussed in greater detail below, can be understood by reference to theillustrative embodiments of the disclosure depicted in the appendeddrawings. However, the appended drawings illustrate only typicalembodiments of the disclosure and are therefore not to be consideredlimiting of scope, for the disclosure may admit to other equallyeffective embodiments.

FIG. 1 depicts a showerhead with a gas distribution plate in accordancewith some embodiments of the present disclosure.

FIG. 2 depicts a process chamber suitable for use with a showerheadhaving a gas distribution plate in accordance with some embodiments ofthe present disclosure.

To facilitate understanding, identical reference numerals have beenused, where possible, to designate identical elements that are common tothe figures. The figures are not drawn to scale and may be simplifiedfor clarity. Elements and features of one embodiment may be beneficiallyincorporated in other embodiments without further recitation.

DETAILED DESCRIPTION

Embodiments of showerheads having a detachable gas distribution plateare provided herein. In at least some embodiments, the inventiveshowerhead may advantageously allow for the removal and replacement ofthe gas distribution plate, thus providing a showerhead having a longeruseful life and a more cost efficient manner of replacing the gasdistribution plate as compared to conventional showerheads having apermanently bonded gas distribution plate.

FIG. 1 depicts a showerhead with a gas distribution plate in accordancewith some embodiments of the present disclosure. The showerhead 100generally comprises a body 102, a gas distribution plate 104 and a clamp110 configured to removably couple the gas distribution plate to thebody 102.

The body 102 comprises a first side 150, a second side 140 and aplurality of through holes 116 formed in the body 102 extending from thefirst side 150 to the second side 140. The plurality of through holes116 facilitate the passage of process gases through the body 102 to thegas distribution plate 104. In some embodiments, the through holes 116may be counter sunk (e.g., countersink 118 shown) to reduce a residualelectrical field at the through holes 116 and to facilitate a moreuniform gas flow to the gas distribution plate 104. In some embodiments,a cavity 114 may be formed in first side 150 of the body 102 tofacilitate more even distribution of process gases to the plurality ofthrough holes 116. The body 102 may be fabricated from any suitableprocess compatible material, for example, such as aluminum. Byfabricating the body 102 from a conductive material such as aluminum,the body 102 may function as an electrode to facilitate, for example,the formation of a plasma from process gases provided to the showerhead100. In some embodiments the second side 140 of the body 102 may becoated with a material to protect the second side 140 from ions, plasma,or light up. For example, in some embodiments, the coating may be anyttrium fluoride (YF₃) coating. The coating may be disposed on thesecond side 140 of the body 102 using various techniques. Some exemplarynon-limiting methods for coating the second side 140 of the body 102 mayinclude deposition or evaporation of the coating onto the body 102 froma target made from or otherwise including the coating material using anelectron-beam induced activation of the target material.

In some embodiments, one or more channels may be formed in the surfacesof the body 102 to accommodate one or more O-rings and/or radiofrequency (RF) gaskets (O-rings 130, 132, 134 and RF gaskets 108, 126shown). When present, the O-rings 130, 132, 134 provide a seal betweenthe body 102 and clamp 110 or surfaces of the process chamber (notshown). The O-rings 130, 132, 134, may be fabricated from any materialsuitable to facilitate the aforementioned seal, for example, rubber. TheRF gaskets 108, 126 facilitate conductivity of RF power from, forexample, an RF source to the body 102 and the clamp 110. For example, RFpower may be provided from an RF power supply (such as the RF powersupply 286 described below) to a component coupled to the body 102 andin contact with one or more RF gaskets (e.g., RF gasket 126). The RFgaskets 108, 126 may be fabricated from any suitable conductivematerial, for example stainless steel.

The gas distribution plate 104 facilitates distribution of process gasesprovided from the body 102 to, for example, a processing volume of aprocess chamber via a plurality of gas distribution holes 142 formed inthe gas distribution plate 104. The gas distribution holes 142 may bearranged in any manner suitable to provide a desired distribution ofprocess gases. For example, in some embodiments, the gas distributionholes 142 may be arranged in clusters disposed about the through holes116 of the body 102 when the gas distribution plate 104 is coupled tothe body 102.

The gas distribution plate 104 may be fabricated from any materialsuitable to resist degradation during exposure to a plasma (e.g., aplasma formed in a process chamber during processing). For example insome embodiments, the gas distribution plate 104 may be fabricated fromsingle crystalline silicon (Si). Single crystal silicon is not typicallyused as a material for the gas distribution plate at least in part dueto single crystal silicon having a faster etch rate as compared tosilicon carbide, a favored material. However, the inventors haveobserved that single crystalline silicon is less susceptible to surfaceroughness change, arcing, and micro-masking, and further provides betteroperability at elevated temperatures (e.g., higher than about 150degrees Celsius) as compared to conventional materials utilized tofabricate gas distribution plates, for example, such as silicon carbide(SiC). In addition, single crystal silicon is more readily available andobtainable at a lower cost as compared to the conventional materials. Inaddition, in embodiments where the showerhead 100 is used in substrateprocesses involving silicon-containing gases, fabricating the gasdistribution plate 104 from silicon reduces the instances ofcontamination due to degradation of the gas distribution plate 104.

In some embodiments, the gas distribution plate 104 is fabricated from asingle crystalline silicon material having a high electrical resistivitybetween about 60 ohm-cm and 90 ohm-cm to reduce arcing. As noted above,the inventors have observed that low resistivity gas distribution plates(e.g., a gas distribution plate having a resistivity of about0.005-0.015 Ohm-cm) will arc during processes in which the source poweris greater than or equal to 2000 watts at 162 MHz. Thus, the highresistivity of the gas distribution plate 104 advantageously reducesarcing when the showerhead 100 is used in high source power processes.In some embodiments, the ingot from which the single crystalline siliconis obtained may be doped to change the resistivity of the ingot. Forexample, the single crystalline silicon ingot may be doped or coatedwith a high resistivity material such as boron to increase theresistivity of the material. In some embodiments, if the gasdistribution plate 104 is formed from a low resistivity material, thegas distribution plate 104 may be treated, coated or doped with a highresistivity material to increase the resistivity of the gas distributionplate 104.

The gas distribution plate 104 may have any suitable thicknesssufficient to provide a desired gas distribution and suitable usefulfunctional life. In addition, in some embodiments, the gas distributionplate 104 may have a suitable thickness sufficient to ensure continuouscontact with one or more thermal gaskets (three thermal gaskets 120,122, 124 shown) disposed between the gas distribution plate 104 and thebody 102 when the gas distribution plate 104 is coupled to the body 102.For example, in some embodiments, the thickness of the gas distributionplate 104 may be selected such that an amount of bowing of the gasdistribution plate 104 caused by the forces provided by the clamp 110 atthe edge of the gas distribution plate 104 is less than an amount ofdeformation of the thermal gaskets 120, 122, 124 when compressed, thusensuring continuous contact with each of the thermal gaskets 120, 122,124 when clamped. Alternatively, or in combination, in some embodiments,the thickness of the gas distribution plate 104 may be selected toprovide an aspect ratio of the gas distribution holes 142 suitable toreduce plasma penetration and improve the useful functional life of thegas distribution plate 104. For example, in embodiments where the gasdistribution holes 142 have a diameter of about 0.5 mm, the gasdistribution plate 104 may have a thickness of about 9 mm.

The clamp 110 facilitates coupling the gas distribution plate 104 to thebody 102. In some embodiments, the clamp 110 facilities such couplingvia a fastener 106 provided to a through hole 136 formed in the body 102corresponding to a threaded hole 138 formed in the clamp. The clamp 110may be fabricated from any process compatible conductive material, forexample aluminum. In some embodiments, the clamp 110 may be coated witha spray coating (e.g., yttria (Y₂O₃)) to reduce degradation of the clamp110 in a plasma environment. In some embodiments, the clamp 110 mayalternatively be anodized with an aluminum oxide coating.

In some embodiments, the clamp 110 may include one or more channelsformed in surfaces of the clamp 110 to accommodate one or more O-ringsand RF gaskets (O-ring 128 and RF gasket 148 shown). When present, theO-ring 128 provides cushioning to the gas distribution plate 104 toprevent breakage of the gas distribution plate 104 when clamped to thebody 102. When present, the RF gasket 148 facilitates conductivity of RFpower from the body 102, through the clamp 110, and to the gasdistribution plate 104, thus allowing the gas distribution plate 104 tofunction as an RF electrode. Providing the RF current path to the gasdistribution plate 104 also shields a gap 146 between the body 102 andthe gas distribution plate 104, which reduces arcing, for example, atthe through holes 116 of the body 102. The O-ring 128 and RF gasket 148may be fabricated from any suitable material, for example such as thematerials discussed above with respect to the O-rings 130, 132, 134, andRF gaskets 108, 126.

In some embodiments, the thermal gaskets 120, 122, 124 may be disposedbetween the body 102 and gas distribution plate 104. When present, thethermal gaskets 120, 122, 124 may facilitate a heat exchange between thebody 102 and the gas distribution plate 104, for example, to provide amore uniform thermal gradient across the gas distribution plate 104. Inaddition, the thermal gaskets 120, 122, 124 may provide the gap 146between the body 102 and the gas distribution plate 104 and defineseparate plenums (e.g., zones) for groups of through holes 116 andcorresponding gas distribution holes 142. In some embodiments, theshowerhead 100 may also include a plurality of pins 152 that are pressedinto the body 102. The plurality of pins 152 ensures that the gap 146remains substantially unchanged when the gas distribution plate 104deflects toward the body 102. The pins 152 each include a through-hole153 to ensure that any gaps behind the pins 152 are properly evacuated.

The thermal gaskets 120, 122, 124 may be fabricated from anycompressible, thermally conductive material having low out-gassing atprocess pressures and temperatures (e.g., vacuum conditions andtemperatures at or above about 150 degrees Celsius). In someembodiments, the gasket may comprise a silicone containing material suchas, for example, SARCON® GR-M available from Fujipoly® or other siliconerubber material having a high thermal conductivity and flame-retardantproperties. The thermal gaskets 120, 122, 124 may have any shapesuitable to maintain contact between the body 102 and the gasdistribution plate 104. For example, in some embodiments, the thermalgaskets 120, 122, 124 may be a plurality of concentric rings having arectangular cross section as shown in FIG. 1. In some embodiments, thegeometry of the thermal gaskets 120, 122, 124 may be optimized toaccommodate for a difference in distance between the body 102 and thegas distribution plate 104 when clamped together due to the forcesprovided by the clamp 110 at the edge of the gas distribution plate 104(e.g., bowing of the gas distribution plate 104).

In some embodiments, a protective ring 112 may be disposed about theshowerhead to shield portions of the body 102, clamp 110 and gasdistribution plate 104. The protective ring 112 may be fabricated fromany suitable process compatible material, for example, quartz (SiO₂).

FIG. 2 depicts a schematic view of an illustrative process chamber 200suitable for use with a showerhead in accordance with some embodimentsof the present disclosure. Exemplary process chambers may include theENABLER®, ENABLER® E5, ADVANTEDGE™, or other process chambers, availablefrom Applied Materials, Inc. of Santa Clara, Calif. Other suitableprocess chambers having, or being modified to have, showerheads maysimilarly benefit from the present disclosure.

In some embodiments, the process chamber 200 may generally comprise achamber body 202 having a substrate support pedestal 208 for supportinga substrate 210 thereupon disposed within an inner volume 205 of thechamber body, and an exhaust system 220 for removing excess processgases, processing by-products, or the like, from the inner volume 205 ofthe chamber body 202.

In some embodiments, an upper liner 264 and a lower liner 266 may coverthe interior of the chamber body 202 to protect the chamber body 202during processing. In some embodiments, the chamber body 202 has aninner volume 205 that may include a processing volume 204. Theprocessing volume 204 may be defined, for example, between the substratesupport pedestal 208 and a showerhead 214 (e.g., showerhead 100described above) and/or nozzles provided at desired locations. In someembodiments, a gas supply 288 may provide one or more process gases tothe showerhead 214 for distribution of the one or more process gases tothe processing volume 204 of the chamber body 202.

In some embodiments, the substrate support pedestal 208 may include amechanism that retains or supports the substrate 210 on the surface ofthe substrate support pedestal 208, such as an electrostatic chuck, avacuum chuck, a substrate retaining clamp, or the like. Alternatively,or in combination, in some embodiments, the substrate support pedestal208 may include mechanisms for controlling the substrate temperature(such as heating and/or cooling devices, not shown) and/or forcontrolling the species flux and/or ion energy proximate the substratesurface. For example, in some embodiments, the substrate supportpedestal 208 may include an electrode 240 and one or more power sources(two bias power sources 238, 244) coupled to the electrode 240 viarespective matching networks 236, 262. For example, the substratesupport pedestal 208 may be configured as a cathode coupled to a biaspower source 244 via a matching network 262. The above described biaspower sources (e.g., bias power sources 238, 244) may be capable ofproducing up to 12,000 W at a frequency of about 2 MHz, or about 13.56MHz, or about 60 Mhz. The at least one bias power source may provideeither continuous or pulsed power. In some embodiments, the bias powersource alternatively may be a DC or pulsed DC source.

In some embodiments, the substrate support pedestal 208 may include asubstrate support ring 280 disposed atop the substrate support pedestal208 and configured to support at least a portion of the substrate 210during processing. In some embodiments, one or more rings (insert ring278 and barrier ring 242 shown) may be disposed about the substratesupport pedestal 208. The one or more rings may be fabricated from anysuitable process compatible material. For example, in some embodiments,the insert ring may be fabricated from silicon (Si). In someembodiments, the barrier ring 242 may be fabricated from quartz (SiO₂).In some embodiments, a grounded mesh 260 may be disposed about theperiphery of the substrate support pedestal 208 and coupled to thechamber body 202.

The substrate 210 may enter the chamber body 202 via an opening 212 in awall of the chamber body 202. The opening 212 may be selectively sealedvia a slit valve 218, or other mechanism for selectively providingaccess to the interior of the chamber through the opening 212. Thesubstrate support pedestal 208 may be coupled to a lift mechanism 234that may control the position of the substrate support pedestal 208between a lower position (as shown) suitable for transferring substratesinto and out of the chamber via the opening 212 and a selectable upperposition suitable for processing. The process position may be selectedto maximize process uniformity for a particular process. When in atleast one of the elevated processing positions, the substrate supportpedestal 208 may be disposed above the opening 212 to provide asymmetrical processing region.

In some embodiments, a protective ring 206 (e.g., the protective ring112 described above) may be disposed about, and covering at least aportion of, the showerhead 214, for example, such as the body 294 (e.g.,body 102 described above) or the gas distribution plate 296 (e.g., thegas distribution plate 104 described above) of the showerhead 214. Insome embodiments, the protective ring 206 may be supported by the upperliner 264.

In some embodiments, the showerhead 214 may be coupled to and/orsupported by, a chiller plate 270. When present, the chiller plate 270facilitates control over a temperature of the showerhead 214 duringprocessing. In some embodiments, the chiller plate 270 comprises aplurality of channels (not shown) formed in the chiller plate 270 toallow a temperature control fluid provided by a temperature controlfluid supply (chiller) 290 to flow through the chiller plate 270 tofacilitate the control over the temperature of the showerhead 214.

In some embodiments, one or more coils (inner coil 274 and outer coil272 shown) may be disposed above and/or proximate a peripheral edge ofthe showerhead 214. When present, the one or more coils may facilitateshaping a plasma formed within the processing volume 204 of the processchamber 200.

In some embodiments, an RF power source 286 provides RF power to thechiller plate 270 and/or the showerhead 214 via a coaxial stub 292. TheRF power source 286 may operate at a power greater than or equal to 2000Watts and a frequency of 162 MHz and up to 5000 W at a frequency ofabout 227 MHz. As described above, the inventive gas distribution plate104 will not arc during processes in which the RF power source operatesat a power of 2000 W or more at high frequencies. The coaxial stub 292is a fixed impedance matching network having a characteristic impedance,resonance frequency, and provides an approximate impedance match betweenthe showerhead 214 and the RF power source 286. In some embodiments, thecoaxial stub 292 generally comprises an inner cylindrical conductor 298,an outer cylindrical conductor 201 and an insulator 203 filling thespace between the inner cylindrical conductor 298 and the outercylindrical conductor 201.

The inner cylindrical conductor 298 and the outer cylindrical conductor201 may be constructive of any suitable conductive material capable ofwithstanding the particular process environment. For example, in someembodiments, the inner cylindrical conductor 298 and the outercylindrical conductor 201 may be fabricated from nickel-coated aluminum.One or more taps 221 are provided at particular points along the axiallength of the coaxial stub 292 for applying RF power from the RF powersource 286 to the coaxial stub 292. An RF power terminal 207 and the RFreturn terminal 209 of the RF power source 286 are connected at the tap221 on the coaxial stub 292 to the inner cylindrical conductor 298 andthe outer cylindrical conductor 201, respectively. A terminatingconductor 211 at the far end 213 of the coaxial stub 292 shorts theinner cylindrical conductor 298 and the outer cylindrical conductor 201together, so that the coaxial stub 292 is shorted at a far end 213 ofthe coaxial stub 292. At the near end 215 of the coaxial stub 292, theouter cylindrical conductor 201 is connected to the chamber body 202 viaan annular conductive housing or support 276, while the innercylindrical conductor 298 is connected to the chiller plate 270 and/orshowerhead 214 via a conductive cylinder 217. In some embodiments, adielectric ring 219, is disposed between and separates the conductivecylinder 217 and the chiller plate 270.

The exhaust system 220 generally includes a pumping plenum 224 and oneor more conduits that couple the pumping plenum 224 to the inner volume205 (and generally, the processing volume 204) of the chamber body 202,for example via one or more inlets 222. A vacuum pump 228 may be coupledto the pumping plenum 224 via a pumping port 226 for pumping out theexhaust gases from the chamber body 202. The vacuum pump 228 may befluidly coupled to an exhaust outlet 232 for routing the exhaust toappropriate exhaust handling equipment. A valve 230 (such as a gatevalve, or the like) may be disposed in the pumping plenum 224 tofacilitate control of the flow rate of the exhaust gases in combinationwith the operation of the vacuum pump 228. Although a z-motion gatevalve is shown, any suitable, process compatible valve for controllingthe flow of the exhaust may be utilized.

To facilitate control of the process chamber 200 as described above, thecontroller 250 may be one of any form of general-purpose computerprocessor that can be used in an industrial setting for controllingvarious chambers and sub-processors. The memory, or computer-readablemedium, 256 of the CPU 252 may be one or more of readily availablememory such as random access memory (RAM), read only memory (ROM),floppy disk, hard disk, or any other form of digital storage, local orremote. The support circuits 254 are coupled to the CPU 252 forsupporting the processor in a conventional manner. These circuitsinclude cache, power supplies, clock circuits, input/output circuitryand subsystems, and the like.

One or more methods and/or processes may generally be stored in thememory 256 as a software routine 258 that, when executed by the CPU 252,causes the process chamber 200 to perform the processes methods and/orprocesses. The software routine 258 may also be stored and/or executedby a second CPU (not shown) that is remotely located from the hardwarebeing controlled by the CPU 252. Some or all of the method of thepresent disclosure may also be performed in hardware. As such, themethods and/or processes may be implemented in software and executedusing a computer system, in hardware as, e.g., an application specificintegrated circuit or other type of hardware implementation, or as acombination of software and hardware. The software routine 258 may beexecuted after the substrate 210 is positioned on the substrate supportpedestal 208. The software routine 258, when executed by the CPU 252,transforms the general purpose computer into a specific purpose computer(controller) 250 that controls the chamber operation such that themethods disclosed herein are performed.

Thus, embodiments of a showerhead having a detachable gas distributionplate have been provided herein. Embodiments of the inventive showerheadmay advantageously provide a longer useful life and a more costefficient manner of replacing the gas distribution plate as compared toconventional showerheads.

While the foregoing is directed to embodiments of the presentdisclosure, other and further embodiments of the disclosure may bedevised without departing from the basic scope thereof.

The invention claimed is:
 1. A showerhead for use in a semiconductorprocessing chamber, comprising: a body having a first side and a secondside opposing the first side; a gas distribution plate disposedproximate the second side of the body, wherein the gas distributionplate is formed from a material having an electrical resistivity betweenabout 60 ohm-cm to 90 ohm-cm; a clamp disposed about a peripheral edgeof the gas distribution plate to removably couple the gas distributionplate to the body, wherein a lower surface of the clamp is coplanar witha lower surface of the gas distribution plate; and a thermal gasketdisposed in a gap between the body and gas distribution plate.
 2. Theshowerhead of claim 1, wherein the thermal gasket comprises a pluralityof concentric rings disposed between the body and the gas distributionplate radially inward of an innermost surface of the clamp.
 3. Theshowerhead of claim 1, further comprising: an yttrium fluoride coatingon the second side of the body.
 4. The showerhead of claim 1, furthercomprising: one or more pins pressed into the second side of the bodyand disposed in the gap to maintain a thickness of the gap when the gasdistribution plate deflects toward the body.
 5. The showerhead of claim4, wherein each of the one or more pins includes a through-hole to allowa volume behind each pin to be evacuated.
 6. The showerhead of claim 1,wherein the body comprises a plurality of through holes extending fromthe first side to the second side of the body.
 7. The showerhead ofclaim 6, wherein the body comprises a plenum formed in the first side ofthe body, the plenum fluidly coupled to the plurality of through holes.8. The showerhead of claim 1, wherein the gas distribution plate isfabricated from single crystalline silicon (Si).
 9. The showerhead ofclaim 8, wherein the gas distribution plate is fabricated from singlecrystalline silicon (Si) that is doped or coated with a high resistivitymaterial.
 10. The showerhead of claim 8, wherein the gas distributionplate is fabricated from single crystalline silicon (Si) that is dopedor coated with boron.
 11. A process chamber, comprising: a chamber bodyhaving a substrate support disposed within an inner volume of thechamber body; and a showerhead disposed within the inner volume of thechamber body opposite the substrate support, the showerhead comprising:a body having a first side and a second side opposing the first side,wherein the first side of the body is coupled to a component of theprocess chamber; a gas distribution plate disposed proximate the secondside of the body, wherein the gas distribution plate is formed from amaterial having an electrical resistivity between about 60 ohm-cm to 90ohm-cm; a clamp disposed about a peripheral edge of the gas distributionplate to removably couple the gas distribution plate to the body,wherein a lower surface of the clamp is coplanar with a lower surface ofthe gas distribution plate; and a thermal gasket disposed in a gapbetween the body and gas distribution plate.
 12. The process chamber ofclaim 11, wherein the component of the process chamber is a chillerplate, and wherein the chiller plate is coupled to a ceiling of thechamber body.
 13. The process chamber of claim 11, wherein the thermalgasket comprises a plurality of concentric rings disposed between thebody and the gas distribution plate radially inward of an innermostsurface of the clamp.
 14. The process chamber of claim 11, furthercomprising a radio frequency (RF) power source that operates at a powergreater than or equal to 2000 Watts and a frequency of 162 MHz.
 15. Theprocess chamber of claim 11, further comprising: a plurality of pinspressed into the second side of the body and abutting an upper surfaceof the gas distribution plate to maintain a thickness of the gap whenthe gas distribution plate deflects toward the body.
 16. The processchamber of claim 15, wherein each of the plurality of pins includes athrough-hole to allow a volume behind each pin to be evacuated.
 17. Theprocess chamber of claim 11, wherein the gas distribution plate isfabricated from single crystalline silicon (Si).
 18. The process chamberof claim 11, wherein the gas distribution plate is fabricated fromsingle crystalline silicon (Si) that is doped or coated with a highresistivity material.
 19. The process chamber of claim 11, wherein thegas distribution plate is fabricated from single crystalline silicon(Si) that is doped or coated with boron.
 20. A showerhead for use in asemiconductor processing chamber, comprising: a body having a first sideand a second side opposing the first side, the second side including anyttrium fluoride coating; a gas distribution plate disposed proximatethe second side of the body, wherein the gas distribution plate isformed from a material having an electrical resistivity between about 60ohm-cm to 90 ohm-cm; an anodized clamp disposed about a peripheral edgeof the gas distribution plate to removable couple the gas distributionplate to the body, wherein a lower surface of the clamp is coplanar witha lower surface of the gas distribution plate; a plurality of siliconethermal gaskets disposed in a gap between the body and gas distributionplate; and a plurality of pins pressed into the second side of the bodyand disposed in the gap to maintain a thickness of the gap when the gasdistribution plate deflects toward the body.